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BRUTE Hydrazine Datasheet

RASIRC BRUTE Hydrazine delivers waterfree hydrazine (N2H4) gas into atomic layer deposition (ALD) processes in a repeatable method. BRUTE Hydrazine includes a vaporizer pre-loaded with hydrazine and a proprietary solvent. BRUTE Hydrazine can be used for a variety of metal nitride deposition processes at temperatures below 400°C.

PUBLISHED JULY 2018
4 MINUTE READ

Peroxidizer Datasheet

The RASIRC Peroxidizer provides a safe, reliable way to deliver high-concentration hydrogen peroxide gas into ALD, annealing, dry surface preparation and cleaning processes.

PUBLISHED IN 2018
4 MINUTE READ

BRUTE Peroxide Datasheet

RASIRC BRUTE Peroxide provides a breakthrough method to deliver virtually water-free hydrogen peroxide (H2O2) gas into Atomic Layer Deposition (ALD) and Etch (ALE) processes. BRUTE Peroxide solution is preloaded in a RASIRC vaporizer. This solution combines hydrogen peroxide liquid and a proprietary solvent, which ensures that the liquid source remains below 30% by weight hydrogen peroxide.

PUBLISHED 2017
4 MINUTE READ

RainMaker Humidification System (RHS) Datasheet

The RHS purifies and precisely controls water vapor delivery, reducing costs, increasing yield and improving throughput. Delivery of water vapor can be controlled from low ppm levels to high concentrations.

PUBLISHED FEB 2018
4 MINUTE READ

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RASIRC products generate and deliver water vapor, hydrogen peroxide and hydrazine gas in controlled, repeatable concentrations to critical processes.

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